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????????????????????????????????? ??????????????????
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??? ????????????????SPS??????????????????????????????????????????????????SPS??????????????????????SPS?? ?????????2??????????е???á?
1 ???
???????????????????????????????????????????????????????????????????μ???????μ?????????????????????Spark Plasma Sintering?????SPS?????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????
2 ??????SPS????????????
SPS????????????????????????????????м????????????е???????????????????????????????????plasmaactivatedsintering-PAS??plasma-assistedsintering-PAS??[1,2]??????1930??????????????????????????????????????1965???????????????????????????????á?????????SPS????????????????δ?????ü????????????Ч???????????SPS??????е???????á?
1988???????????????????SPS?????????2????о????????????á?1990??????????????????????????SPS???????????????10??100t ?????????????????5000??8000A?????????????????500t??????????25000A?????SPS??á?????SPS???????п???????????Ч????????????????????????л????????????SPS?????????????SPS?????2?????о??????[3]??1998????乺??SPS????????????????????????????????????????о?????[4]??
?????????????????SPS????????2?????о?????[1,3]???????????SPS???????????????????????????????[5??8]??SPS??????????????????????????????????????????
3 SPS????????
3.1 ????????????????????[9??10]
SPS?????÷?????????????????????????????????????????????μ?????????????????????????????????????????????????????????????壬?????????????????????????????????????????????????????????塣
????????????????μ??????壬????????????????????????????4000??10999?棬???????????????????????????????????????????????????Щ??????????????????????????????????????????
?????????????????????????????????????CVD?????μ???????PBD???????????????????????????????????????????????????????????棬????????????????????????????????á?????????????????????????????????????????????????[1]??
?????????????????????????????????????????????????????????硢???????????????????塣SPS???????????????????塣
3.2 SPS??ú??????????
SPS???????????????????????????????????????繅???????壻????????????????????????????弰??????λ????????????????????????????SPS??????????1?????
SPS???????HP?????????????????????????????????????????-??????????????????????????????-????????????????????????????????????塢?????????????????糡???????[11]??SPS????????????????????????2???????SPS???????У??繅??????????????????????????????壬?????????????????????????????????????????????????????????????????SHS???????????????SPS????Ч???÷????????????????????????????SPS???????????????????硢????????????????????????????????????????????????????SPS?????У??????????Ч?????????????£???????????????????????????????μ??????????????????????????????????????????????????????????????塣?糡?????????????????[1??9??12]??
4 SPS?????????
SPS?????????????????????????????????????????????????????Ч???????????С????????????????????????????????????????????????????????????????[3??11]????HP??HIP????SPS??ò??????????????????????????????[11]????????????????100mm????17mm??ZrO2(3Y)/????????????FGM????????????58min?????????????28min?????????5min????????25min????HP????SPS????????????????100??200??[13]??
5 SPS?????????е????
?????????????????????????SPS????2?????о????????????????????SPS????????????????1??????????????????SPS??????в??????????????MoSi2????[14]??ZrO2/Cermet/Ni??[15]??
??????????????SPS????2?????о?????????????ɡ???????ɡ?????仯?????????????????????檔?????о??????????????????????????[16] ?????????[17] ????????????[18] ????????????[19]????????????[20]?????SPS??????????????????[21] ?????????????????????????????
5 .1 ??????????
???????????FGM???????????仯????????????????????????????????????????ɡ?????CVD??PVD???????????????????????????????????????y???????????????????????????????????????????????????????????SPS????????в???????????????????????????????ó??????????????????SPS???????????????У??????/ZrO2??Ni/ZrO2??Al/?????Al/????????PSZ/T?????????
??????????????SHS???У??糡???н????Ч??????????????????Ч?????????????????????????????????????Χ????????????????????????????????????????????????????????????????SHS?糡?????????SPS??????????ɡ?????????????????????????????У?????65nm???????????SHS????????????????[22]??????SPS??????????FGM????SPS??????????FGM?????ZrO2(3Y)/???????????????100mm??17mm[23]??
????????????WC???????????????????SPS????WC??????????SPS?????WC/Mo??????????????HV???????????????24Gpa??6Mpa??m1/2,??????????WC??Mo??????????????????????????????[24]??
5 .2 ??????
?????????????????????????????????????????????????????????????о?????????????????????????????????SPS????????????о??У???????????о????
(1)???????????????????????Ч?????Ч??????????磬????????FeSi2????????????????????????????200??900??????????????????FeSi2??ж????????????к????????????????н???絼?????繦?????????????????????Z=??2/k???????Z??????????????Seebeck?????k?????????????????????????????????Ч????????????????????SPS????????????FeSix(Si???????)?????FeSi2??????????????[25]??????????????Cu/Al2O3/Cu[26],MgFeSi2[27], ??Zn4Sb3[28],??軯??[]29]???
(2)????????????????????????????????????????????????????????????????????????????????????Щ???????????????????????????????????????????????е????????????????????????????????????????????????????????SPS??????????????????????????????????????????????????????????????С???SPS???????????????????????????????????????????????????????и???????????????????????Ч???
????????-??????????????????????????????????????????????????????????????Bi,Sb,Te??Se????????Z??3.0??10-3/K??????SPS????????????Z????2.9??3.0??10-3/K??????????????????????[30]????2??SPS??????????????BiTe????????
5 .3 ???????
??SPS??????????PbTiO3?????900??1000???????1??3min,?????????????磼1??m???????????98????????????п??????[31]???????101??106HZ????糣???????????????仯??
??SPS??????????Bi4Ti3O12????????????徧?????????????????????????????SPS??????????????????????????????????????Bi4Ti3O12??????????????????????[32]??
??SPS???????Li???IIVI????ZnO???????????????Tc????470K???????????????????330K[34]??
5 .4 ???????
??SPS???Nd Fe B????????????????????????????????????????????????3???????????3????????????????????????????????????????????????????????????????????????????????о????????????? [35] ??
SPS???????????????????????????????????????Nd Fe Co V B ??650???±???5min,???????????????????????壬??з??????????[36]????SPS?????865Fe6Si4Al35Ni??MgFe2O4?????????850?棬130MPa???????и??????????Bs=12T??????????=1??10-2????m[37]??
?????????????????????????????????????????С?????????????????????????壬????????????????????SPS???????????????????????????????????????????????[3]??
5 .5 ???????
????????????????????????????????????????????????????????????????????????????????????????????????????????????SPS??????????????????????????????????????????????磺??????????5??m??TiN???SPS???1963K??196??382MPa?????5min???????????????65nm??TiN?????[3]??????[3]???????й?????????SPS????о???????????????????????????????????????????????????
??SPS??????????????????С??????????????????????????Q?????????????????????????????????????Q????????С????????????????????????????????SPS?????????????????????????
????????????г?????????????65nm??TiN?????????????????[38]?У?????????SPS????????20??30nm??Fe90Zr7B3???????????????????????????SPS??????仯??????[7]?????SPS????????????????????????????????????????о???
5. 6 ??????????
????????????У??????????????????м???????γ????????????????ü???????γ???????????????????????н?????????????????????????????????????κ?????????????????????????????????????????÷???????????側(cè)?????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????[39]?????????????????????????????????????????
SPS?????????????????????????y????????[40]??????SPS??????е??????????Al????????????????????10mm??2mm???????????????375MPa??503K?????20min?????????з????????????????Sn???????????????533K??????[41]?????????????423K??500MPa???????Mg80Ni10Y5B5???????????????????????????????Mg????A291D?????t?н???????λ??????????????????????????t????????????????????????????????SPS???????????????????????????SPS???????д????????????о????б????
6????????
???????????SPS????????????????????????????????????????ɡ?????????????????????????????????SPS???????y????2?????о????????????з?????????á?
SPS????????????в???????????????д?????????????о????????SPS????????豸????????????????????????????????????????????????????????SPS????????????????????????????????????????????????????[42]??
???????????????????????SPS????????????????????????????????????ī??????????????????????????????????????????????????????????á?
???????棬?????????????????????????2?????????????????????????SPS??????????????棬??????????????????????????
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